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HM-100 Residual Gas Analyzer
- high resolution
- <1amu
- Strong detection ability
- Minimum detectable partial pressure 3*10-14Torr
- Wide mass range
- 1-100amu, can identify H2, He, H2O, N2, O2, CO2 and other key gases
Product Overview
The HM-100 is a sensor used for gas composition analysis, requiring a matching sample introduction system and analysis software.
As the core sensor for gas composition analysis, it can perform qualitative and quantitative analysis of residual gas components within a sealed chamber. Like a sophisticated diagnostic expert, it accurately identifies and quantifies various gaseous components such as H₂O, O₂, N₂, and CO₂ within the chamber by measuring the intensity of ions with different mass-to-charge ratios.
Specifications
| Product Specifications | Name | Residual Gas Analyzer (RGA) | Performance Parameters | Sensor Length | 315 mm |
| Overall Length | 486 mm | ||||
| Model | HM-100 | Mass Range | 1-100 amu | ||
| Resolution (@10% Peak Height) | <1 amu | ||||
| Dimensions (mm) | L486*W119*H119 | Filament Type | Yttria-coated Iridium Dual Filament / Dual Tungsten Filament | ||
| Detector Type | FC/CEM | ||||
| Voltage and Power Consumption | DC24V, 5A | Sensitivity (FC) |
3*10-4A/Torr |
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| Sensitivity (EM) | 0.1 A/Torr | ||||
| Weight | 3kg | Minimum Detectable Partial Pressure (EM) |
3*10-14Torr |
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| Maximum Sensor Operating Temperature (FC/EM) | 200 ℃ /120 ℃ | ||||
| Maximum Working Pressure | 5*10-4Torr | Maximum Bakeout Temperature | 300℃ | ||
| Maximum Scan Rate | 20 ms/point | ||||
| Maximum Operating Pressure | 5 *10-4Torr |
Application Scenarios
Application Examples
