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产品概述
HM-100 is a "sensor" that can be used for gas component analysis and needs to be used with a sampling system and analysis software.
As the core of gas composition analysis"sensor", it can conduct qualitative and quantitative analysis of the residual gas composition inside the sealed cavity.Like a precise diagnostic expert, it accurately identifies and quantifies various gas components such as H₂O, O₂, N₂, and CO₂ remaining in the cavity by measuring the intensity of ions with different mass-to-charge ratios.
规格参数
| Product specifications | Name | Residual gas analyzer (RGA) | Performance parameters | Sensor length |
| Overall length | 486mm | |||
| HM-100 | Mass number range | 1-100 amu | ||
| <1 amu | ||||
| Size (mm) | Filament type | Coated yttrium oxide iridium double filament / double tungsten filament | ||
| Detector type | FC/CEM | |||
| Voltage and power consumption | DC24V, 5A | sensitivity (FC) | ||
| Sensitivity (EM) | 0.1 A/Torr | |||
| Weight | 3kg | 3*10-14Torr | ||
| Maximum sensor operating temperature (FC/EM) | 200 ℃ /120 ℃ | |||
| Maximum working pressure | Maximum baking temperature | Maximum scan rate | 20 ms/ points | |
| Maximum working pressure | 5 *10-4Torr |
应用场景
应用案例
