HM-130 High-Performance Residual Gas Analyzer-Shenzhen Hirays Automation Technology Co., Ltd

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Accessories
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HM-130 High-Performance Residual Gas Analyzer

Ultra-High Sensitivity: With a minimum detectable partial pressure of 2E-15 Torr, it accurately captures ultra-low concentration gas impurities.

Instantaneous Response: Features high-speed scanning at 2 ms/data point, enabling real-time detection of transient process changes.

Wide-Range Detection: Covers the full range of 1 to 300 amu, supporting qualitative and quantitative analysis across diverse scenarios and various gases.

Stable and Reliable: Designed for the demanding environments of semiconductors and vacuum coating, it maintains stable performance over long-term operation, ensuring a high degree of consistency in mass production processes.

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Product Overview Specifications Application Scenarios Application Examples

Product Overview

Specifically tailored for semiconductor and vacuum processes, the HM-130 High-Performance RGA leverages proprietary core technology to equip vacuum manufacturing with a digital "eye of insight."

Specifications

Application Scenarios

Application Examples