- Bubble Leak Detectors
- Airtightness Testers
- Gas Detectors
-
Mass Spectrometers
HM-100 residual gas analyzer (RGA) HM-200 online mass spectrometer HM-210 online mass spectrometer HM-310 atmospheric-pressure electrolyte leak detector HM-500 multi-gas leak detector HM-230 Multi-Pressure Residual Gas Analyzer HM-150 High-Pressure Residual Gas Analyzer HM-130 High-Performance Residual Gas Analyzer
- Helium Mass Spectrometer Leak Detectors
- Test Platforms
- Fixtures
- Accessories
HM-150 High-Pressure Residual Gas Analyzer
- High-Pressure Compatibility
- Supports an operating pressure of up to 2 Pa, highly optimized for PVD process monitoring.
- Full-Spectrum Scanning
- Dual mass ranges of 1-50 amu and 1-100 amu. Supports both full-spectrum scanning and specific mass number scanning. Accurately resolves gases such as H₂, He, N₂, O₂, and Ar to achieve rapid qualitative and quantitative analysis.
- Ultra-High Sensitivity
- A minimum partial pressure detection limit of 2E-9 Pa, enabling precise identification of contamination sources.
- Intelligent Control & Early Warning
- Supports API integration and automated monitoring with alarm functions, empowering digital production lines.
Product Overview
Engineered specifically for high-pressure and demanding operating conditions, the HM-150 High-Pressure RGA acts as a loss-prevention vanguard on your production line. It leverages robust technology to redefine the benchmar
k for yield, safeguarding the stable manufacturing of high-end industries.
Specifications
Application Scenarios
Application Examples
