HM-230 Multi-Pressure Residual Gas Analyzer
- Wide Pressure Adaptability
- Full-range coverage from 1E-8 Torr to 1.2 atm. Choose from 3 mass ranges (1-100/200/300 amu) for precise, real-time monitoring of critical gases (H₂, He, N₂, O₂, Ar).
- Real-Time Online Analysis
- Millisecond response time captures dynamic gas changes instantly. Immediate alarms alert you to abnormal fluctuations, ensuring process safety.
- All-in-One Integration
- Combines RGA, vacuum, and sampling modules into a compact system. Skip the complex vacuum setup—just connect and test for fast, hassle-free implementation.
- Contamination-Resistant Design
- Equipped with anti-fouling coatings and surface passivation to repel process deposits. Protects core components and significantly extends instrument lifespan.
Product Overview
The HM-230 Multi-Pressure Residual Gas Analyzer is an all-in-one online mass spectrometry system incorporating an RGA, vacuum system, and smart sampling module. Engineered for complex multi-pressure environments, it safeguards the stable operation of your advanced manufacturing processes.
Specifications
Application Scenarios
Application Examples
