HM-100 residual gas analyzer (RGA)
- high resolution
- <1amu
- Strong detection ability
- Minimum detectable partial pressure 3*10-14Torr
- Wide mass range
- 1-100amu, can identify H2, He, H2O, N2, O2, CO2 and other key gases
Product Overview
HM-100 is a "sensor" that can be used for gas component analysis and requires a sampling system and analysis software.
As the core of gas composition analysis"Sensor", which can conduct qualitative and quantitative analysis of the residual gas components inside the sealed cavity.Like a precise diagnostic expert, it accurately identifies and quantifies various gas components such as H₂O, O₂, N₂, and CO₂ remaining in the cavity by measuring the intensity of ions with different mass-to-charge ratios.
Specifications
| product specifications | name | Residual Gas Analyzer (RGA) | Performance parameters | Sensor length | 315 mm |
| overall length | 486 mm | ||||
| Specifications and models | HM-100 | Mass range | 1-100 amu | ||
| Resolution (@10% peak height) | <1 amu | ||||
| Dimensions (mm) | L486*W119*H119 | Filament type | Ytttrium oxide coated iridium filament dual filament / dual tungsten filament | ||
| Detector type | FC/CEM | ||||
| Voltage and power consumption | DC24V，5A | Sensitivity(FC) | 3*10-4A/Torr | ||
| Sensitivity(EM) | 0.1 A/Torr | ||||
| weight | 3kg | Minimum detectable partial pressure (EM) | 3*10-14Torr | ||
| Maximum sensor operating temperature (FC/EM) | 200 ℃ /120 ℃ | ||||
| highest working pressure | 5*10-4Torr | Maximum baking temperature | 300℃ | ||
| Maximum scan rate | 20 ms/point | ||||
| Maximum working pressure | 5 *10-4Torr |
Application Scenarios
Application Examples
