You are also manufacturing semiconductor wafers

Yield bottleneckWorrying?

Yield keeps fluctuating?The root cause may be"gas"!

Expensive process gasesLeakage is difficult to prevent？

Troubled by out-of-control corrosive gas concentrations?

Tiny leaks are hard to find, both yield and cost are lost?

Hai RuisiRGASeal testing solution

Hitting the pain point——

✔ Capture fluctuations in real time to ensure concentration stability

✔ Accurate and fast response, stable etching process

✔ Change from passive to proactive warning to protect yield and cost

Say goodbye to leakage hazards and stabilize the lifeblood of the process!

WelcomeSEMI-eShenzhen Semiconductor Exhibition

14HallK11booth

Unlock your own sealing solution!

There are also professional engineers on site to answer your questions.

Looking forward to meeting you!

The following is the exhibition guide, pleaseCollect quickly!

01

Exhibition time

Traffic guidance

02

subway:subway12Line No.,20Line No. 1 goes directly to the National Exhibition Center North Station (C1、C2Exit to the North Login Hall), and you can quickly travel to and from Shenzhen city and the airport.

Bus:Shenzhen International Convention and Exhibition Center1stand: 615road,B892Coloane Line; Shenzhen International Convention and Exhibition Center2stand: M515road,B892Coloane Line

Self drive:AThe line is routed by the Guozhan Interchange-Fengtang Avenue-Zhancheng Road-P1；BThe line is routed by the Guozhan Interchange-Fengtang Avenue-Binjiang Avenue-P5

03

Booth route map

04Exhibition weather

Kind tips：

1. There may be light rain during the exhibition, please bring rain gear.

2. The humidity is high on rainy days, so keep warm and avoid getting cold.

05

Star product

HM-100 Residual gas analyzer↑

high resolution:<1amu

High sensitivity:Minimum detectable partial pressure3*10^-14 Torr

Wide mass range:1-100amu,identifiableH₂、He、H₂O、N₂、O₂、CO₂and other key gases

HM-200Online mass spectrometer↑

use RGA technologyDirectly detect electrolyte leakage without detecting gas,High sensitivity,lower cost; Comes with a touch screen for precise control.

HM-400Helium mass spectrometer leak detector↑

Minimum detectable leak rate 5*10^-13Pa·m³/s; Both positive and negative pressure can be checked, fully covering the needs.; The trolley-type structure is lightweight and efficient, and is suitable for various production environments.; Modular and compact design, easy system integration, suitable for various automated assembly lines.

HV-100 VOCsDetector↑

Detection accuracy1ppb, responds in seconds; supports a variety of test gases and application scenarios; is compact, convenient and easy to operate; automatically stores and supports data traceability.

We all understand your confusion

Welcome to our booth