As high-end manufacturing moves toward zero-defect production, three problems remain stubbornly hard to solve: micro-leaks that escape detection, process gas composition that stays opaque, and vacuum contamination that is traced only after the damage is done. They cut across liquid cooling, new energy, semiconductors, vacuum coating, photovoltaics, aerospace and other advanced manufacturing sectors.

Hirays (HIRAYS) has spent nearly two decades in sealing integrity testing. Built on fully proprietary mass spectrometry technology, the company has assembled a complete HM product matrix spanning two lines — mass spectrometer leak detectors and mass spectrometer analyzers — delivering one-stop solutions from qualitative and quantitative leak detection to real-time process gas monitoring for semiconductors, new energy, liquid cooling, 3C electronics (computing, communications and consumer devices), vacuum coating and refrigeration.

01 | Mass Spectrometer Leak Detectors

Electrolyte Characteristic-Gas Leak Detection

▲ HM-210 Electrolyte Leak Detector: for micro-leak detection of electrolyte across the full power- and consumer-battery chain — cells, modules, PACK assemblies and finished power banks. An upgraded in-line model with a compact footprint, support for fully automated line integration, strong immunity to interference, and a fit for high-rate production.

Ambient-Pressure Electrolyte Leak Detection

▲ HM-310 Ambient-Pressure Electrolyte Leak Detector: an innovative dual-mode design combining ambient-pressure circulating sampling with negative-pressure rapid testing. It enables sealed battery-pack testing without disassembly, with gross-leak rejection and multi-layer false-call prevention — built for aftersales troubleshooting and fast end-of-line screening.

Refrigerant / Multi-Gas Leak Detection

▲ HM-500 Multi-Gas Leak Detector: minimum detectable leak rate as low as 0.05 g/a, precisely detecting R134a, R600a and other refrigerants plus user-defined tracer gases. Suited to refrigerant leak testing in air conditioners, refrigerators, commercial refrigeration equipment and automotive HVAC systems.

All three are based on quadrupole mass spectrometry and directly detect characteristic volatile electrolyte species — DMC (dimethyl carbonate), EMC (ethyl methyl carbonate), DEC (diethyl carbonate) and their characteristic ions — as well as refrigerant molecules. This delivers accurate qualitative and quantitative analysis and addresses, at the root, the two limits of conventional airtightness testing: micro-leaks missed and false calls frequent. Seamless MES integration and end-to-end data traceability come standard, with flexible fit into automated lines of every kind — making quality inspection both precise and efficient.

Ultra-High-Sensitivity Leak Location and Quantification

▲ HM-400 Helium Mass Spectrometer Leak Detector: built on magnetic-deflection (magnetic-sector) mass spectrometry, using helium as the tracer gas. Differences in ion deflection radius within the magnetic field enable high-resolution separation of helium ions; combined with dedicated signal-processing algorithms, it reaches a minimum detectable leak rate of 5 × 10⁻¹³ Pa·m³/s. The instrument supports sniffer, helium spray, vacuum chamber, accumulation and back-pressure methods, handles both positive- and negative-pressure testing, and pairs an optimized mass spectrometer system with fast, interference-resistant response.

It is widely used for seal integrity testing and leak location on liquid cooling systems, new-energy battery systems, aerospace components, semiconductor equipment and precision medical devices.

02 | Mass Spectrometer Analyzers

HM-100 / 130 / 150 Residual Gas Analyzers

For semiconductors · vacuum coating · photovoltaics · research

Dedicated to chamber residual gas analysis and process monitoring

HM-100 Residual Gas Analyzer — the classic entry-level RGA. With 3 × 10⁻¹⁴ Torr sensitivity, it identifies key residual gases precisely and lays a solid foundation for vacuum system diagnostics.

HM-130 High-Performance Residual Gas Analyzer — 2 × 10⁻¹⁵ Torr ultra-high sensitivity, 2 ms per point scanning and full 1–300 amu coverage make it the digital eye for CVD, PVD, ALD and etch processes.

HM-150 High-Pressure Residual Gas Analyzer — engineered for elevated-pressure PVD conditions, it supports operating pressures up to 2 Pa, uses an yttria-coated iridium / tungsten dual-filament design to resist corrosive chemistries, and locks onto trace impurities with millisecond-level response — the yield-loss defender on the production line.

These three are RGA sensing units — the "sensor" at the heart of gas composition analysis — designed to be paired with a sampling system and analysis software. The line-up runs in a complete tier from entry-level to high-performance, including models rated for elevated-pressure and other demanding conditions, covering virtually every application scenario. (The HM-230 below takes the opposite approach: it integrates all three elements into one unit.)

They monitor H₂O, H₂, N₂, O₂, Ar, CO, CO₂ and other key species, along with partial-pressure changes inside the vacuum chamber in real time, providing a reliable data foundation for process optimization, contamination tracing, chamber outgassing analysis and anomaly diagnosis.

HM-230 Multi-Pressure Residual Gas Analyzer

From high vacuum to atmospheric pressure — full-gradient pressure coverage for semiconductor processes

This unit integrates the RGA, vacuum system and intelligent sampling module into one platform. Covering 1 × 10⁻⁸ Torr to 1.2 atm via its wide-pressure inlet and pairing FC / EM dual detectors, it is plug-and-measure across multi-process pressure regimes — the indispensable in-line gas sentinel for complex processes.

HM-200 In-Line Mass Spectrometer

For R&D trials and low-volume validation

Residual gas composition analysis in vacuum systems, qualitative and quantitative process gas monitoring, and contamination tracing — supporting validation work and process development.

Shared advantages across the RGA analysis line

API data upload across the series, supporting digital, connected factories

Fully proprietary core components, shorter lead times and rapid response from a local engineering team

03 | Why the Hirays HM Series

1 | Trusted by Industry Leaders

A certified high-tech enterprise with nearly two decades focused on sealing integrity testing, Hirays has long served leading customers in 3C, new energy, liquid cooling and automotive. Sustained iteration and volume delivery capability give customers stable, long-term quality assurance.

2 | One Mass Spectrometry Platform, Two Lines

Leak detection and analysis from a shared technology base — covering multi-scenario inspection needs in advanced manufacturing with one-stop high-end precision testing.

3 | Fully Proprietary Core Technology

With its own manufacturing base and completely in-house core technology, Hirays reduces reliance on imported systems, keeps the supply chain controllable, and gives customers more certainty on lead times and after-sales support.

4 | Data That Connects

API-ready interfaces and seamless MES integration make inspection data traceable, feed process optimization, and strengthen the yield defense.

5 | Local Support, End to End

From line assessment and prototype trials to custom fixturing and lifetime maintenance support — full-chain coverage.

Make every micro-leak visible. Make every gas shift measurable.

If you are working on —

Seal integrity leak testing for high-end manufacturing and advanced processes

Residual gas analysis and contamination tracing in vacuum chambers

Real-time process gas monitoring and yield improvement

— get in touch for a tailored solution. The full Hirays HM family will keep safeguarding your product safety and yield.

Our June RGA promotion is now live: message us with "RGA Trial" to book a free trial run and see what high-precision gas analysis can do for your process.