In the precision chain of semiconductor manufacturing, vacuum process control is where chip yield is won or lost. The HM-130 High-Performance Residual Gas Analyzer (RGA) is built for semiconductor and vacuum applications from the ground up. Powered by proprietary core technology, it gives vacuum processes a digital eye — the ability to see exactly what is inside the chamber, not just how low the pressure reads.

1. Eight Core Capabilities Behind Smarter Manufacturing

Ultra-High Sensitivity: Capturing What Can't Be Seen

With a minimum detectable partial pressure of 2 × 10⁻¹⁵ Torr, the HM-130 resolves trace gas impurities at ultra-low concentrations, exposing contamination before it can turn into wafer defects.

Instant Response: Keeping Pace with Fast Process Cycles

A 2 ms per point scan rate captures transient process changes in real time, staying in step with advanced-node cycle times. Abnormal gas fluctuations are flagged within milliseconds — before they become batch scrap.

Broad Detection Range: One Instrument, Multiple Scenarios

Based on quadrupole mass spectrometry, the 1–300 amu full range supports qualitative and quantitative analysis across multiple gases and multiple use cases, significantly lowering the cost per test.

High Signal-to-Noise: Resolving the Weakest Signals

Clean, stable signal output sharpens the identification of weak peaks, so every dataset is dependable — reducing unnecessary process adjustments and unplanned troubleshooting downtime caused by false readings.

Yield Improvement: Getting Quality Right at the Source

Continuous monitoring of the vacuum environment pinpoints the origin of anomalous gases quickly, helping engineers tune process parameters with precision, improve consistency and yield, and translate metrology directly into margin.

Proprietary Core Technology: A Backstop for Supply Chain Security

In-house developed technology reduces reliance on imported systems, while a local engineering team responds rapidly to service needs. The result is a controllable supply chain, lower equipment acquisition and maintenance costs, and freedom from overseas supply constraints.

Proven Stability: Consistent Under Harsh Conditions

Designed for demanding semiconductor and vacuum coating environments, the HM-130 holds its performance over long runs, keeping high-volume production consistent and repeatable.

Smart Integration: Ready for the Connected Fab

Support for multiple communication protocols enables seamless integration into automated lines, with real-time data transfer and remote monitoring for digital, intelligent factory builds.

2. Beyond Semiconductors: One Platform, Many Vacuum Applications

From process chamber monitoring in semiconductor fabs to leak detection in new-energy manufacturing; from gas composition analysis in vacuum coating to space environment simulation in aerospace; from ultra-high vacuum monitoring in particle accelerators to materials and chemical analysis in research laboratories — the HM-130 Series RGA performs with precision across all of them, serving as a reliable partner wherever vacuum is part of the process.

3. The Real Problem: Trace Gases You Can't See

In vacuum processing, residual gas is an invisible hazard — quietly threatening production safety, yield and reputation:

Conventional vacuum gauges only tell you whether total pressure meets spec. They cannot identify which gas species are present, in what proportion, or whether the chamber is genuinely clean.

Ultra-low-concentration impurities can form defects on the wafer surface and scrap an entire chip, yet go unflagged because sensitivity is insufficient for early warning.

In high-speed processes, transient gas spikes have already caused batch scrap before an alarm ever triggers; conventional analyzers simply cannot scan fast enough to keep up.

The HM-130 High-Performance RGA identifies these invisible culprits inside the chamber, using detection capability to safeguard process integrity — and with it, yield, margin and competitiveness.

4. A New Era of Intelligent Vacuum Process Control

Built on a proprietary core, engineered as a shield for yield. The HM-130 Series is both Hirays' commitment to self-reliant technology and its promise of a smarter, more efficient future. Hirays will continue to drive forward with core technology as its engine, delivering stronger vacuum process solutions to customers worldwide and exploring what intelligent manufacturing can do next.

The Hirays RGA series has been field-validated at multiple leading semiconductor fabs. For product details, a live demo, or to request an on-site evaluation, get in touch with our team.