Semiconductors
Other industry solutionsSemiconductor manufacturing covers many precision process links, and the sealing performance of each link directly affects the yield and reliability of the final product.From etching equipment to CVD deposition, from glue remover to cleaning equipment, sealing failure in any link may lead to process contamination, equipment shutdown and even product scrapping.Hairis provides professional sealing testing solutions for the entire semiconductor manufacturing process to ensure that each process equipment maintains excellent sealing performance in the harsh semiconductor manufacturing environment.
We provide accurate testing of four key process equipment for semiconductor manufacturing:
Etching equipment seal detection
Helium mass spectrometry leak detection technology is used to accurately detect key parts such as reaction chambers and gas pipelines to ensure the purity and stability of the process environment.
CVD equipment seal verification
Conduct a comprehensive inspection of the reaction chamber and air intake system of the deposition equipment to prevent film quality defects caused by gas leakage.
Glue remover seal evaluation
Conduct professional testing on the cavity sealing of the glue removal equipment to ensure temperature uniformity and environmental cleanliness during the process.
Cleaning equipment seal detection
Conduct sealing verification on the piping system and cavity interfaces of wet cleaning equipment to prevent cross-contamination caused by chemical leakage.
Detection accuracy reaches 10⁻¹¹ mb·L/s, exceeding industry standards
The comprehensive utilization rate of equipment increased to more than 95%
Product yield increased by 0.8-1.5%
Annual maintenance costs reduced by 35%
