Semiconductors
Wafer industry solutionsAs the cornerstone of semiconductor manufacturing, wafer sealing performance during its production process directly affects chip yield and performance.In nanoscale processes, any trace of gas leakage or contaminant penetration may cause the entire batch of wafers to be scrapped.Hairis provides professional sealing testing solutions for the special requirements of each link in wafer manufacturing to ensure perfect manufacturing of wafers in an ultra-clean environment.
We provide precise testing for the four key aspects of wafer manufacturing:
Process equipment cavity seal detection
Ultra-high sensitivity helium mass spectrometry leak detection technology is used to detect the sealing performance of reaction chambers of etching, deposition and other equipment to ensure the purity of the process environment.
Gas delivery system seal verification
Conduct comprehensive inspections of special gas pipelines and interfaces to prevent process parameter deviation and cross-contamination caused by gas leakage.
Vacuum transfer system seal evaluation
For components such as wafer transfer manipulators and vacuum locks, their dynamic sealing performance under motion is evaluated to ensure the stability of the transfer process.
Environmental control system seal testing
Conduct sealing verification on auxiliary equipment such as temperature control units and cooling systems to ensure precise control of the process environment.
Detection accuracy reaches 10⁻¹² mb·L/s, exceeding industry standards
Equipment utilization rate increased to over 98.5%
Wafer manufacturing yield increased by 1.2-2.5%
Annual maintenance costs reduced by 40%
